Influence of Film Thickness on Surface Morphology of Nanostructured Azo Thin Films Deposited by Rf Magnetron Sputtering

Abstract

Nanostructured Aluminum doped Zinc Oxide thin films were deposited on glass substrates by RF magnetron sputtering in an Ar + O2 gas mixture using commercially available Zn metal (99.999% purity) and Al (99.99% purity) targets. Scanning Electron Microscope (SEM) images of AZO thin films reveal that the optical transmittance depends on the thickness of the film, whereas the grain sizes are between 20 and 44 nm.